Protection of polymer from atomic-oxygen erosion using Al2O3 atomic layer deposition coatings
نویسندگان
چکیده
Thin films of Al2O3 grown using atomic layer deposition (ALD) techniques can protect polymers from erosion by oxygen atoms. To quantify this protection, polyimide substrates with the same chemical repeat unit as Kapton were applied to quartz crystal microbalance (QCM) sensors. Al2O3 ALD films with varying thicknesses were grown on the polyimide substrates. The ALD-coated polyimide materials were then exposed to a hyperthermal atomic-oxygen beam. The mass loss versus oxygen-atom exposure time was measured in situ by the QCM. Al2O3 ALD film thicknesses of ∼35 Å were found to protect the polymer from erosion. © 2007 Elsevier B.V. All rights reserved.
منابع مشابه
Water-soluble non-polymeric electrospun cyclodextrin nanofiber template for the synthesis of metal oxide tubes by atomic layer deposition
We report on the suitability of water-soluble non-polymeric electrospun cyclodextrin (CD) nanofiber templates by using atomic layer deposition (ALD) to yield metal oxide tubes. To demonstrate this, watersoluble electrospun CD nanofibers were chosen as template to produce metal oxide tubes where we have tested two examples of ALD coatings, namely, Al2O3 and ZnO. After the ALD coating on the CD n...
متن کاملThin Film Oxide Barrier Layers: Protection of Kapton from Space Environment by Liquid Phase Deposition of Titanium Oxide
Polyimides are widely used for the external surfaces of spacecraft. In low Earth orbit (LEO), they are exposed to atomic oxygen (AO) and to problems of electrostatic discharge (ESD). This work demonstrates that liquid-phase deposition (LPD) of titania creates a protective coating on Kapton polyimide that is effective in reducing AO-induced surface erosion and in preventing ESD. Adherent titania...
متن کاملAntireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
Antireflection (AR) coatings are indispensable in numerous optical applications and are increasingly demanded on highly curved optical components. In this work, optical thin films of SiO2, Al2O3, TiO2 and Ta2O5 were prepared by atomic layer deposition (ALD), which is based on self-limiting surface reactions leading to a uniform film thickness on arbitrarily shaped surfaces. Al2O3/TiO2/SiO2 and ...
متن کاملAntioxidation properties of Ti0.83Al0.17N prepared using plasma-enhanced atomic layer deposition
The high-temperature antioxidation behavior of Ti0.83Al0.17N prepared using plasma-enhanced atomic layer deposition sPEALDd with TiCl4, AlCl3, N2/H2/Ar, and NH3/H2/Ar radicals were studied. One cycle for depositing Ti0.83Al0.17N consisted of eight TiN cycles followed by two AlN cycles. After forming a 30-nm-thick Ti0.83Al0.17N film, the film was oxidized in ambient O2 at 650 °C for 30 min. The ...
متن کاملAtomic Layer Deposition Al2O3 Coatings Significantly Improve Thermal, Chemical, and Mechanical Stability of Anodic TiO2 Nanotube Layers
We report on a very significant enhancement of the thermal, chemical, and mechanical stability of self-organized TiO2 nanotubes layers, provided by thin Al2O3 coatings of different thicknesses prepared by atomic layer deposition (ALD). TiO2 nanotube layers coated with Al2O3 coatings exhibit significantly improved thermal stability as illustrated by the preservation of the nanotubular structure ...
متن کامل